1 中国科学院半导体研究所半导体材料科学重点实验室, 北京 100083
2 中国科学院大学材料与光电研究中心, 北京 100049
由于半导体量子点具有很强的三维量子限制效应,量子点(QD)激光器展现出低阈值电流、高调制速率、高温度稳定、低线宽增强因子和高抗反射等优异性能,有望在未来高速光通信及高速光互连等领域有重要的应用。同时,量子点结构具有对位错不敏感的特性,使得量子点激光器成为实现硅光集成所迫切需求的高效光源强有力候选者。先简要综述1.3 μm半导体量子点激光器的研究进展,再着重介绍GaAs基量子点激光器在阈值电流密度、温度稳定性、调制速率和抗反射特性等方面展示出的优异特性,最后对在切斜Si衬底和Si(001)衬底上直接外延生长的量子点激光器进行介绍。
激光器 半导体激光器 量子点 硅基 阈值电流
Author Affiliations
Abstract
1 Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
We report 25 Gb/s high-speed directly modulated ground-state operation of 1.3 μm InAs/GaAs quantum dot (QD) lasers grown by molecular beam epitaxy. The active region of the lasers consists of eight layers of p-doped InAs QDs with high uniformity and density. Ridge-waveguide lasers with a 3-μm-wide and 300-μm-long cavity show a low threshold current of 14.4 mA at 20°C and high temperature stability with a high characteristic temperature of 1208 K between 20°C and 70°C. Dynamic response measurements demonstrate that the laser has a 3 dB bandwidth of 7.7 GHz at 20°C and clearly opened eye diagrams even at high temperatures up to 75°C under a 25 Gb/s direct modulation rate.
semiconductor lasers quantum dot molecular beam epitaxy direct modulation Chinese Optics Letters
2020, 18(7): 071401
